Microsensors, MEMS, and smart devices / Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim.
Material type:
TextPublisher: Chichester ; New York : J. Wiley, [2001]Copyright date: ©2001Description: xvi, 503 pages : illustrations ; 25 cmContent type: - text
- unmediated
- volume
- 047186109X
- 9780471861096
- 621.381
- TK7875. G37 2001
Contents:
1. Introduction -- 2. Electronic Materials and Processing -- 3. MEMS Materials and their Preparation -- 4. Standard Microelectronic Technologies -- 5. Silicon Micromachining: Bulk -- 6. Silicon Micromachining: Surface -- 7. Microstereolithography for MEMS -- 8. Microsensors -- 9. Introduction to SAW Devices -- 10. Surface Acoustic Waves in Solids -- 11. IDT Microsensor Parameter Measurement -- 12. IDT Microsensor Fabrication -- 13. IDT Microsensors -- 14. MEMS-IDT Microsensors -- 15. Smart Sensors and MEMS.
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|
| Book | City Campus City Campus Main Collection | 621.381 GAR (Browse shelf(Opens below)) | 1 | Available | A255141B |
Browsing City Campus shelves, Shelving location: City Campus Main Collection Close shelf browser (Hides shelf browser)
| 621.381 FAR Accompanying part (Disc) Essential electronics for PC technicians / | 621.381 FLO Electronics fundamentals : circuits, devices, and applications / | 621.381 FUT Future trends in microelectronics : the nano, the giga, and the ultra / | 621.381 GAR Microsensors, MEMS, and smart devices / | 621.381 GAT Introduction to electronics / | 621.381 KIS Industrial electronics : applications for programmable controllers, instrumentation and process control, and electrical machines and motor controls / | 621.381 KUN Digital dreams : the work of the Sony Design Center / |
Includes bibliographical references and index.
1. Introduction -- 2. Electronic Materials and Processing -- 3. MEMS Materials and their Preparation -- 4. Standard Microelectronic Technologies -- 5. Silicon Micromachining: Bulk -- 6. Silicon Micromachining: Surface -- 7. Microstereolithography for MEMS -- 8. Microsensors -- 9. Introduction to SAW Devices -- 10. Surface Acoustic Waves in Solids -- 11. IDT Microsensor Parameter Measurement -- 12. IDT Microsensor Fabrication -- 13. IDT Microsensors -- 14. MEMS-IDT Microsensors -- 15. Smart Sensors and MEMS.
Machine converted from AACR2 source record.
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