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Microsensors, MEMS, and smart devices / Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim.

By: Contributor(s): Material type: TextTextPublisher: Chichester ; New York : J. Wiley, [2001]Copyright date: ©2001Description: xvi, 503 pages : illustrations ; 25 cmContent type:
  • text
Media type:
  • unmediated
Carrier type:
  • volume
ISBN:
  • 047186109X
  • 9780471861096
Subject(s): DDC classification:
  • 621.381
LOC classification:
  • TK7875. G37 2001
Contents:
1. Introduction -- 2. Electronic Materials and Processing -- 3. MEMS Materials and their Preparation -- 4. Standard Microelectronic Technologies -- 5. Silicon Micromachining: Bulk -- 6. Silicon Micromachining: Surface -- 7. Microstereolithography for MEMS -- 8. Microsensors -- 9. Introduction to SAW Devices -- 10. Surface Acoustic Waves in Solids -- 11. IDT Microsensor Parameter Measurement -- 12. IDT Microsensor Fabrication -- 13. IDT Microsensors -- 14. MEMS-IDT Microsensors -- 15. Smart Sensors and MEMS.
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Holdings
Item type Current library Call number Copy number Status Date due Barcode
Book City Campus City Campus Main Collection 621.381 GAR (Browse shelf(Opens below)) 1 Available A255141B

Includes bibliographical references and index.

1. Introduction -- 2. Electronic Materials and Processing -- 3. MEMS Materials and their Preparation -- 4. Standard Microelectronic Technologies -- 5. Silicon Micromachining: Bulk -- 6. Silicon Micromachining: Surface -- 7. Microstereolithography for MEMS -- 8. Microsensors -- 9. Introduction to SAW Devices -- 10. Surface Acoustic Waves in Solids -- 11. IDT Microsensor Parameter Measurement -- 12. IDT Microsensor Fabrication -- 13. IDT Microsensors -- 14. MEMS-IDT Microsensors -- 15. Smart Sensors and MEMS.

Machine converted from AACR2 source record.

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