TY  - BOOK
AU  - Gardner,J.W.
AU  - Varadan,V.K.
AU  - Awadelkarim,Osama O.
TI  - Microsensors, MEMS, and smart devices
SN  - 047186109X
AV  - TK7875. G37 2001
U1  - 621.381 
PY  - 2001///]
CY  - Chichester, New York
PB  - J. Wiley
KW  - Microelectromechanical systems
KW  - Detectors
KW  - Intelligent control systems
N1  - Includes bibliographical references and index; 1; Introduction --; 2; Electronic Materials and Processing --; 3; MEMS Materials and their Preparation --; 4; Standard Microelectronic Technologies --; 5; Silicon Micromachining: Bulk --; 6; Silicon Micromachining: Surface --; 7; Microstereolithography for MEMS --; 8; Microsensors --; 9; Introduction to SAW Devices --; 10; Surface Acoustic Waves in Solids --; 11; IDT Microsensor Parameter Measurement --; 12; IDT Microsensor Fabrication --; 13; IDT Microsensors --; 14; MEMS-IDT Microsensors --; 15; Smart Sensors and MEMS
ER  -