Entry Topical Term
001 - CONTROL NUMBER
- control field: 328799
003 - CONTROL NUMBER IDENTIFIER
- control field: OCoLC
005 - DATE AND TIME OF LATEST TRANSACTION
- control field: 20211102145204.0
008 - FIXED-LENGTH DATA ELEMENTS
- fixed length control field: 020110i| anannbabn |a ana
010 ## - LIBRARY OF CONGRESS CONTROL NUMBER
- LC control number: sh 97007351
035 ## - SYSTEM CONTROL NUMBER
- System control number: (OCoLC)oca04541669
040 ## - CATALOGING SOURCE
- Original cataloging agency: DLC
- Transcribing agency: DLC
- Modifying agency: DLC
- Modifying agency: NNC
- Subject heading/thesaurus conventions: lcsh
053 #0 - LC CLASSIFICATION NUMBER
- Classification number element-single number or beginning number of span: TK7875
150 ## - HEADING--TOPICAL TERM
- Topical term or geographic name entry element: Microelectromechanical systems
450 ## - SEE FROM TRACING--TOPICAL TERM
- Topical term or geographic name entry element: MEMS (Microelectromechanical systems)
450 ## - SEE FROM TRACING--TOPICAL TERM
- Topical term or geographic name entry element: Micro-electro-mechanical systems
450 ## - SEE FROM TRACING--TOPICAL TERM
- Topical term or geographic name entry element: Micro-machinery
450 ## - SEE FROM TRACING--TOPICAL TERM
- Topical term or geographic name entry element: Microelectromechanical devices
450 ## - SEE FROM TRACING--TOPICAL TERM
- Topical term or geographic name entry element: Micromachinery
450 ## - SEE FROM TRACING--TOPICAL TERM
- Topical term or geographic name entry element: Micromachines
450 ## - SEE FROM TRACING--TOPICAL TERM
- Topical term or geographic name entry element: Micromechanical devices
450 ## - SEE FROM TRACING--TOPICAL TERM
- Topical term or geographic name entry element: Micromechanical systems
550 ## - SEE ALSO FROM TRACING--TOPICAL TERM
- Control subfield: g
- Topical term or geographic name entry element: Electromechanical devices
550 ## - SEE ALSO FROM TRACING--TOPICAL TERM
- Control subfield: g
- Topical term or geographic name entry element: Microtechnology
550 ## - SEE ALSO FROM TRACING--TOPICAL TERM
- Topical term or geographic name entry element: Mechatronics
670 ## - SOURCE DATA FOUND
- Source citation: Work cat.: 96069475: Microelectronic structures and MEMS for optical processing II, 1996:
- Information found: p. 4 (Microelectromechanical systems) p. 12 (whether they are called Micro-Electro-Mechanical Systems (MEMS), micromechanical systems, micromachines, or MicroSystems Technology, these manufacturing based technologies are enabling the development and production of many new exciting products)
670 ## - SOURCE DATA FOUND
- Source citation: Eng. ind.
- Information found: (subject: Microelectromechanical devices)
670 ## - SOURCE DATA FOUND
- Source citation: BPI
- Information found: (subjects: Microelectromechanical systems; Micromachines)
670 ## - SOURCE DATA FOUND
- Source citation: ASTI on FirstSearch, Sept. 26, 1997
- Information found: (subjects: Micromachines; Mechatronics; titles: Microelectromechanical systems; micro machinery, etc.)
670 ## - SOURCE DATA FOUND
- Source citation: INSPEC on FirstSearch
- Information found: (descriptor: Micromechanical devices; titles: microelectromechanical systems, etc.)
670 ## - SOURCE DATA FOUND
- Source citation: LC database, Sept. 26, 1997
- Information found: (in titles: Micro electro mechanical systems; Microelectromechanical systems; micromachines; microelectromechanical devices)
670 ## - SOURCE DATA FOUND
- Source citation: Univ. of Wash. Center for Applied Microtechnology (CAM) WWW home page, Dec. 12, 2001:
- Information found: What is CAM? (This new discipline of microtechnology embraces ... microelectronics and ... microelectromechanical systems)
675 ## - SOURCE DATA NOT FOUND
- Source citation: The electronics handbook, 1996.
907 ## -
- : .a11607555
- : 23-08-21
- : 29-10-15
- : -
- : -
- : -